The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 23, 2011

Filed:

Oct. 05, 2010
Applicants:

Matthieu Cueff, Grenoble, FR;

Emmanuel Defay, Voreppe, FR;

François Perruchot, Grenoble, FR;

Patrice Rey, St. Jean de Moirans, FR;

Inventors:

Matthieu Cueff, Grenoble, FR;

Emmanuel Defay, Voreppe, FR;

François Perruchot, Grenoble, FR;

Patrice Rey, St. Jean de Moirans, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention relates to a piezoelectric actuation structure including at least one strain gauge and at least one actuator produced from a stack on the surface of a substrate of at least one layer of piezoelectric material arranged between a bottom electrode layer and a top electrode layer, at least a portion of the stack forming the actuator being arranged above a cavity produced in the substrate, characterized in that the strain gauge is a piezoresistive gauge located in the top electrode layer and/or the bottom electrode layer, the layer or layers including electrode discontinuities making it possible to produce said piezoresistive gauge. The invention also relates to a method for producing such a structure.


Find Patent Forward Citations

Cueff, Matthieu. (2011). Piezoelectric actuation structure including an integrated piezoresistive strain gauge and its production method (U.S. Patent No. 8004154). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8004154

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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