The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2011
Filed:
Aug. 30, 2007
Applicants:
Lawrence P. Muray, Moraga, CA (US);
James Spallas, Alamo, CA (US);
Charles Silver, Richmond, CA (US);
Inventors:
Lawrence P. Muray, Moraga, CA (US);
James Spallas, Alamo, CA (US);
Charles Silver, Richmond, CA (US);
Assignee:
Agilent Technologies, Inc., Leveland, CO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/06 (2006.01); H01J 37/12 (2006.01);
U.S. Cl.
CPC ...
Abstract
A charged particle beam column package includes an assembly (e.g., comprising a plurality of layers, which can have a component coupled to one of the layers), and at least one deflector between an extractor and aperture of the assembly. Further, at least one of the layers has interconnects thereon.