The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2011
Filed:
Jul. 18, 2007
Xavier Rottenberg, Schaarbeek, BE;
Phillip Ekkels, Enschede, NL;
Hendrikus Tilmans, Maasmechelen, BE;
Walter DE Raedt, Lint, BE;
Xavier Rottenberg, Schaarbeek, BE;
Phillip Ekkels, Enschede, NL;
Hendrikus Tilmans, Maasmechelen, BE;
Walter De Raedt, Lint, BE;
IMEC, Leuven, BE;
Katholieke Universiteit Leuven, Leuven, BE;
Abstract
A method for the production of a planar structure is disclosed. The method comprises producing on a substrate a plurality of structures of substantially equal height, and there being a space in between the plurality of structures. The method further comprises providing a fill layer of electromagnetic radiation curable material substantially filling the space between the structures. The method further comprises illuminating a portion of the fill layer with electromagnetic radiation, hereby producing a exposed portion and an unexposed portion, the portions being separated by an interface substantially parallel with the first main surface of the substrate. The method further comprises removing the portion above the interface.