The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 23, 2011

Filed:

May. 19, 2008
Applicants:

Lorenzo Faraone, Western Australia, AU;

John Marcel Dell, Western Australia, AU;

Charles Anthony Musca, Western Australia, AU;

Jarek Antoszewski, Western Australia, AU;

Kevin James Winchester, Western Australia, AU;

Inventors:

Lorenzo Faraone, Western Australia, AU;

John Marcel Dell, Western Australia, AU;

Charles Anthony Musca, Western Australia, AU;

Jarek Antoszewski, Western Australia, AU;

Kevin James Winchester, Western Australia, AU;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An example tunable cavity resonator for filtering radiation in the optical and IR wavelengths and an example method for fabricating same. The example resonator includes a pair of reflectors, one in fixed relationship to a substrate and the other formed upon a suspended moveable membrane disposed a cavity length from the one reflector. The resonator also includes a pair of spaced apart electrodes either constituted by the reflectors or juxtaposed therewith, which are electrostatically operable to move the membrane and other reflector relative to the one reflector.


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