The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2011
Filed:
Jan. 06, 2009
Tokutaka Miura, Yokohama, JP;
Mitsutoshi Hasegawa, Yokohama, JP;
Yoichi Ando, Inagi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A manufacturing method of a vacuum airtight container includes a baking step of baking, in a vacuum atmosphere, a container in which a first non-evaporable getter and a second non-evaporable getter having an activation temperature higher than that of the first non-evaporable getter are disposed. The baking step further includes steps of baking the entire container by increasing the temperatures of the container to a temperature Tand holding the temperature T, which is equal to or higher than an activation temperature of the first non-evaporable getter and is lower than an activation temperature of the second non-evaporable getter. After holding the temperature T, the entire container is baked by increasing the temperature of the container to a temperature T, which is higher than the activation temperature of the second non-evaporable getter.