The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2011
Filed:
Nov. 27, 2006
Michael Miller, Hollis, NH (US);
Brett P. Masters, Watertown, MA (US);
Michael Miller, Hollis, NH (US);
Brett P. Masters, Watertown, MA (US);
BioScale, Inc., Lexington, MA (US);
Abstract
The invention relates to micro-fabricated devices having a suspended membrane or plate structure and micro-fabrication techniques for making such devices. A substrate defines a cavity passing through the substrate, and the cavity defines a first opening. An intermediate portion is disposed over the substrate and defines a second opening. The second opening is larger in size than the first opening, and the dimensions of the second opening are controlled according to a parameter associated with performance of the device. A membrane is positioned adjacent the second opening.