The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2011
Filed:
May. 31, 2005
Joe G. Tran, Flower Mound, TX (US);
Brian K. Kirkpatrick, Allen, TX (US);
Alfred J. Griffin, Jr., Dallas, TX (US);
Joe G. Tran, Flower Mound, TX (US);
Brian K. Kirkpatrick, Allen, TX (US);
Alfred J. Griffin, Jr., Dallas, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A system () removes wafer edge residue from a target wafer (). A wafer holding mechanism () holds and rotates the target wafer (). A residue remover mechanism () mechanically interacts or abrades an edge surface of the target wafer () and removes strongly adhered residue from the edge surface of the target wafer (). The residue remover mechanism () controls coverage of the mechanical interaction and magnitude of the mechanical interaction.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile