The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 16, 2011

Filed:

Nov. 24, 2010
Applicants:

Matthew Rekow, Santa Cruz, CA (US);

Richard Murison, St-Lazare, CA;

Tullio Panarello, St-Lazare, CA;

Corey Dunsky, Los Gatos, CA (US);

Inventors:

Matthew Rekow, Santa Cruz, CA (US);

Richard Murison, St-Lazare, CA;

Tullio Panarello, St-Lazare, CA;

Corey Dunsky, Los Gatos, CA (US);

Assignee:

ESI-PyroPhotonics Lasers, Inc., Dollard-des-Ormeaux, Quebec, CA;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A series of laser pulses in a pulse train, each pulse with a predetermined temporal power shape, scribes a line in a thin film of material on a substrate. The predetermined temporal pulse shape has a fast risetime and fast falltime and a pulse length between 10% power points of less than 10 ns. Scribing a line in the thin film is achieved by placing the series of laser pulse spots on the line to be scribed such that there is some overlapping area between adjacent laser pulse spots along the line. The use of a series of laser pulses with the predetermined pulse shape to scribe a line in the thin film results in a better quality and cleaner scribing process compared to that achieved with a conventional pulse shape.


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