The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7998825 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 16, 2011

Filed:

Dec. 24, 2008
Applicants:

Han-sang Song, Icheon-si, KR;

Jong-bum Park, Icheon-si, KR;

Jong-kook Park, Icheon-si, KR;

Inventors:

Han-Sang Song, Icheon-si, KR;

Jong-Bum Park, Icheon-si, KR;

Jong-Kook Park, Icheon-si, KR;

Assignee:

Hynix Semiconductor Inc., Icheon-si, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for fabricating a semiconductor device includes: forming an etch stop pattern over a conductive layer, the etch stop pattern having a first opening exposing a top surface of the conductive layer; forming an insulation layer over the etch stop pattern; selectively etching the insulation layer to form a second opening exposing the top surface of the conductive layer; and enlarging the second opening until the etch stop pattern is exposed.


Find Patent Forward Citations

Song, Han-Sang. (2011). Method for fabricating semiconductor device (U.S. Patent No. 7998825). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7998825

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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