The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 16, 2011

Filed:

Aug. 05, 2009
Applicants:

Masahiko Shimada, Toyonaka, JP;

Kazuhiko Hashimoto, Toyonaka, JP;

Satoshi Yamaguchi, Kawachinagano, JP;

Soon Shin Kim, Toyonaka, JP;

Yoshiyuki Takata, Toyonaka, JP;

Takashi Hiraoka, Hannan, JP;

Inventors:

Masahiko Shimada, Toyonaka, JP;

Kazuhiko Hashimoto, Toyonaka, JP;

Satoshi Yamaguchi, Kawachinagano, JP;

Soon Shin Kim, Toyonaka, JP;

Yoshiyuki Takata, Toyonaka, JP;

Takashi Hiraoka, Hannan, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention provides a chemically amplified positive composition comprising: a resin comprising a structural unit represented by the formula (I): wherein Rrepresents a hydrogen atom, a halogen atom, a C1-C4 alkyl group or a C1-C4 perfluoroalkyl group, Z represents a single bond or —(CH)—CO—X—, k represents an integer of 1 to 4, X, X, Xand Xeach independently represents an oxygen atom or a sulfur atom, m represents an integer of 1 to 3 and n represents an integer of 0 to 3, and an acid generator.


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