The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2011
Filed:
Oct. 14, 2010
Takashi Ushijima, Yokohama, JP;
Takeo Yamazaki, Yokohama, JP;
Makoto Terui, Yokohama, JP;
Kazuhiro Hayakawa, Isehara, JP;
Takashi Ushijima, Yokohama, JP;
Takeo Yamazaki, Yokohama, JP;
Makoto Terui, Yokohama, JP;
Kazuhiro Hayakawa, Isehara, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A beam having a base material of silicon monocrystal and at least one projection which is integrally formed so as to be supported at least at one end thereof and which has two surfaces having an orientation plane (111), includes a bottom surface in a plane which is common with a plane of the base material; a groove penetrating from the bottom surface to a top of the projection; and a protecting member having a resistance property against a crystal anisotropic etching liquid and covering an inner wall of the groove.