The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2011
Filed:
Mar. 27, 2009
Masato Shimada, Chino, JP;
Masato Shimada, Chino, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
A liquid ejecting head includes a flow passage forming substrate that includes a plurality of pressure generating chambers juxtaposed to each other and each in communication with a nozzle for ejecting droplets, and piezoelectric elements disposed on the flow passage forming substrate with a diaphragm interposed therebetween. The piezoelectric elements include a lower electrode, a piezoelectric layer, and an upper electrode. The piezoelectric layer tapers downward at its ends. The lower electrode has a width smaller than the width of each of the pressure generating chambers. The piezoelectric layer has a larger width than the lower electrode. The diaphragm has a top layer formed of a titanium oxide (TiO) insulator film. The lower electrode has a top layer formed of a lanthanum nickel oxide (LaNiO) orientation control layer. The piezoelectric layer is formed of columnar crystals, and one part of the piezoelectric layer disposed on the insulator film has a smaller average grain size than the other part of the piezoelectric layer disposed on the orientation control layer.