The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 16, 2011

Filed:

Jul. 31, 2009
Applicants:

Jen-huang Albert Chiou, Libertyville, IL (US);

Shiuh-hui Steven Chen, Lake Zurich, IL (US);

Inventors:

Jen-Huang Albert Chiou, Libertyville, IL (US);

Shiuh-Hui Steven Chen, Lake Zurich, IL (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 7/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

Pressure non-linearity in a low pressure sensor device formed from a silicon diaphragm with an embedded piezoresistive transducer is reduced by using a shallow boss or thin stiffener on an ultra-thin diaphragm while the pressure sensitivity of the device is increased with corner trenches.


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