The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2011
Filed:
Oct. 08, 2008
Paul W. Dwyer, Seattle, WA (US);
Ryan Roehnelt, Kenmore, WA (US);
Paul W. Dwyer, Seattle, WA (US);
Ryan Roehnelt, Kenmore, WA (US);
Honeywell International Inc., Morristown, NJ (US);
Abstract
Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass, a planar coil on the proof mass, a magnet, a first pole piece positioned proximate a first side of the proof mass, and a second pole piece positioned proximate a second side of the proof mass. A magnetic flux field passes from the magnet, through the first pole piece, through the planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane, and into the second pole piece. The first pole piece may extend into a first recessed area of a first housing layer and the second pole piece may extend into a second recessed area of a second housing layer. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.