The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2011
Filed:
Dec. 11, 2007
Youhei Ashimori, Fukui, JP;
Youhei Ashimori, Fukui, JP;
Panasonic Corporation, Osaka, JP;
Abstract
An angular velocity sensor includes a drive electrode section () for inputting a drive signal for driving a detecting element (), a monitor electrode section () detecting the drive status of the detecting element () and outputting a monitor signal, and a sensing electrode section () outputting a sensing signal, which is generated due to an angular velocity given to the detecting element (). The drive electrode section (), the monitor electrode section (), and the sensing electrode section () each have a lower electrode formed on a substrate, a piezoelectric film formed of a piezoelectric material on the lower electrode, and an upper electrode formed on the piezoelectric film. The capacitance value between the upper and lower electrodes of the monitor electrode section () is set to be equal to the capacitance value between the upper and lower electrodes of the sensing electrode section (), and the resistance value between both end portions of the monitor electrode section () is set to be equal to the resistance value between both end portions of the sensing electrode section ().