The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 16, 2011

Filed:

Aug. 01, 2008
Applicants:

Alexander Kaya, Darmstadt, DE;

Michael Huth, Eppstein, DE;

Inventors:

Alexander Kaya, Darmstadt, DE;

Michael Huth, Eppstein, DE;

Assignees:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 60/40 (2010.01); G01Q 70/14 (2010.01);
U.S. Cl.
CPC ...
Abstract

A miniaturized spring element is intended to be particularly suitable for use as a beam probe or cantilever for detecting atomic or molecular forces, in particular in an atomic force microscope, and, to this end, is intended to make it possible to detect its deflection in a particularly reliable manner and with high resolution. For this purpose, the spring element contains a basic body which is formed from a matrix containing embedded nanoparticles or defects. The spring element is produced using the principle of local deposition with focused energetic particles or electromagnetic waves or by pyrolytically induced deposition.


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