The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2011
Filed:
May. 18, 2007
Hyoung-soo Ko, Yongin-si, KR;
Ju-hwan Jung, Yongin-si, KR;
Seung-bum Hong, Yongin-si, KR;
Hong-sik Park, Yongin-si, KR;
Chul-min Park, Yongin-si, KR;
Hyoung-soo Ko, Yongin-si, KR;
Ju-hwan Jung, Yongin-si, KR;
Seung-bum Hong, Yongin-si, KR;
Hong-sik Park, Yongin-si, KR;
Chul-min Park, Yongin-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A semiconductor probe having a wedge shape resistive tip and a method of fabricating the semiconductor probe is provided. The semiconductor probe includes a resistive tip that is doped with a first impurity, has a resistance region doped with a low concentration of a second impurity having an opposite polarity to the first impurity, and has first and second semiconductor electrode regions doped with a high concentration of the second impurity on both side slopes of the resistive tip. The probe also includes a cantilever having the resistive tip on an edge portion thereof, and an end portion of the resistive tip has a wedge shape.