The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2011
Filed:
Aug. 22, 2007
Ryoji Kurosaka, Kawasaki, JP;
Takeaki Itsuji, Hiratsuka, JP;
Ryoji Kurosaka, Kawasaki, JP;
Takeaki Itsuji, Hiratsuka, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An inspection apparatus for acquiring information on a measurement object using electromagnetic waves, comprising a substrate; a transmission line that is formed on the substrate; an electromagnetic wave generating unit for supplying an electromagnetic wave to the transmission line; an electromagnetic wave detecting unit for detecting the electromagnetic wave that has propagated through the transmission line; and a walled structure. The walled structure includes a side wall portion that extends along the transmission line within a region in which the electromagnetic wave that propagates through the transmission line and the measurement object interact with each other.