The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2011
Filed:
Oct. 13, 2007
Giovanni Capellini, Rome, IT;
Gianlorenzo Masini, Carlsbad, CA (US);
Lawrence C. Gunn, Iii, Encinitas, CA (US);
Jeremy Witzens, Del Mar, CA (US);
Joseph W. White, Oceanside, CA (US);
Giovanni Capellini, Rome, IT;
Gianlorenzo Masini, Carlsbad, CA (US);
Lawrence C. Gunn, III, Encinitas, CA (US);
Jeremy Witzens, Del Mar, CA (US);
Joseph W. White, Oceanside, CA (US);
Luxtera, Inc., Carlsbad, CA (US);
Abstract
A method is disclosed for the cleaning of a Si surface at low temperatures. Oxide on the Si surface is brought into contact with Ge, which then sublimates off the surface. The Ge contamination remaining after the oxide removal is cleared away by an exposure to an alkali halide. The disclosed cleaning method may by used in semiconductor circuit fabrication for preparing surfaces ahead of epitaxial growth.