The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2011
Filed:
Jul. 11, 2007
Applicants:
Tomohiro Inoue, Tsukuba, JP;
Masahiko Ando, Hitachinaka, JP;
Shuji Imazeki, Hitachi, JP;
Inventors:
Assignee:
Hitachi, Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A liquid film applicator means can apply a photosensitive lyophobic filmto a substrate. An exposure unitis placed on the back side of the substrate and forms the lyophobic film applied on the substrate into a pattern in alignment with gate electrodes. A dropping unitdrops a test liquid to a surface of the substrate having a pattern of the lyophobic film formed by the exposure means. A measuring meansdetects the droplet dropped by the dropping unit. A determining means determines whether the pattern of the lyophobic film formed by the exposure means is proper or not based on the droplet detected by the detecting means.