The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2011
Filed:
Jul. 23, 2009
Luisa D. Bozano, Los Gatos, CA (US);
Hiroshi Ito, San Jose, CA (US);
Atsuko Ito, Legal Representative, San Jose, CA (US);
Linda K. Sundberg, Los Gatos, CA (US);
Luisa D. Bozano, Los Gatos, CA (US);
Hiroshi Ito, San Jose, CA (US);
Atsuko Ito, legal representative, San Jose, CA (US);
Linda K. Sundberg, Los Gatos, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Photoresist compositions include a blend of at least one fully protected calix[4]resorcinarene and at least one unprotected calix[4]resorcinarene, wherein the fully protected calix[4]resorcinarene has phenolic groups protected with acid labile protective groups; a photoacid generator; and a solvent, and wherein the blend and the photoacid generator are soluble in the solvent. Also disclosed are processes for generating a resist image on a substrate using the photoresist composition.