The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2011
Filed:
Jun. 08, 2005
Applicants:
Shigenori Fujikawa, Fujimi, JP;
Toyoki Kunitake, Fukuoka, JP;
Hideo Hada, Kawasaki, JP;
Toshiyuki Ogata, Kawasaki, JP;
Inventors:
Shigenori Fujikawa, Fujimi, JP;
Toyoki Kunitake, Fukuoka, JP;
Hideo Hada, Kawasaki, JP;
Toshiyuki Ogata, Kawasaki, JP;
Assignee:
Riken, Saitama, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B82B 3/00 (2006.01); C01B 33/12 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of forming a nano-structure can form a fine pattern easily, and the nano-structure obtained by the method is provided. A method of forming a nano-structure comprising forming a thin film by a liquid phase adsorption on surface of a template formed on a substrate, and removing a portion of the thin film, and removing the template is used.