The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2011
Filed:
Mar. 17, 2009
Toshinao Shinbo, Matsumoto, JP;
Kazushige Hakeda, Shiojiri, JP;
Koji Sumi, Nagano-ken, JP;
Tsutomu Nishiwaki, Azumino, JP;
Toshinao Shinbo, Matsumoto, JP;
Kazushige Hakeda, Shiojiri, JP;
Koji Sumi, Nagano-ken, JP;
Tsutomu Nishiwaki, Azumino, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
A method of manufacturing a piezoelectric element includes a piezoelectric layer forming step of sequentially and repeatedly performing a heat treatment step of applying a piezoelectric material containing lead to a lower electrode film at a relative humidity in the range of 30% to 50% Rh and then performing a heat treatment to form a piezoelectric precursor film and a crystallization step of firing the piezoelectric precursor film to form a piezoelectric film on the lower electrode film, thereby forming a piezoelectric layer.