Optical waveguide substrate and substrate mounting photoelectric hybrid circuit

Abstract

There are provided a substrate mounted with a photoelectric hybrid circuit having an optical path conversion mirror structure and optical waveguide wiring by reducing the number of parts and the number of fabrication steps, as well as most effectively implement high-density wiring for an optical connection between the optical waveguide and the photoelectric conversion element or optical waveguide array connector that are formed on the substrate, and a device. An optical waveguide layerstacked on a substrateand formed of a wiring core surrounded by a clad layer, and coreshaving tapered surfaces intersecting the respective wiring coresof the optical waveguide layerperpendicularly are arranged, the tapered surfacesof the coreshaving tapered surfaces are buried respectively in the wiring portion cores intersecting perpendicularly, and a first corefor turning the optical path of light propagating through the wiring portion core at the first corewith a tapered surface, and a second corefor turning the optical path of light passed through the first corewith a tapered surface at the second corewith a tapered surface are arranged alternately.