The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2011
Filed:
Jun. 05, 2008
Applicant:
Seungbae Lee, Greensboro, NC (US);
Inventor:
Seungbae Lee, Greensboro, NC (US);
Assignee:
RF Micro Devices, Inc., Greensboro, NC (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 9/46 (2006.01);
U.S. Cl.
CPC ...
Abstract
Micro-Electro-Mechanical Systems (MEMS) resonator designs having support structures that minimize or substantially reduce anchor losses, thereby improving a quality factor (Q) of the MEMS resonators, are provided. In general, a MEMS resonator includes a resonator body connected to anchors via support structures. The anchors are connected to or are part of a substrate on which the MEMS resonator is formed. The support structures operate to support the resonator body in free space to enable vibration. The support structures are designed to minimize or substantially reduce energy loss through the anchors into the substrate.