Contact probe and method of making the same

Abstract

To provide a contact probe which can easily be connected with a measurement apparatus electrically, can measure a high speed and high frequency signal with a fine pitch easily and correctly, and can easily cope with signal measurement for a plurality of channels, and a method of making the contact probe. It includes a first printed wiring boardhaving a signal electrodeand a ground electrodeused as a contact part with respect to a measuring object, in which the signal electrodeand ground electrodeare formed of a metal wiring pattern on a substrate, and a second printed wiring boardwith a coaxial line structure having shield electrodeswhich enclose a signal lineand the surroundings of the signal linethrough an insulating layer. The signal electrodeof the first printed wiring boardand the signal lineof the second printed wiring boardare electrically connected together, and the ground electrodeof the first printed wiring boardand the shield electrodesof the second printed wiring boardare electrically connected together.