The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2011
Filed:
Oct. 30, 2008
Shiang-lung Koo, Belmont, CA (US);
Yi-ping Hsin, Dublin, CA (US);
Hideyuki Hashimoto, Saitama, JP;
Bausan Yuan, San Jose, CA (US);
Pai-hsueh Yang, Palo Alto, CA (US);
Shiang-Lung Koo, Belmont, CA (US);
Yi-Ping Hsin, Dublin, CA (US);
Hideyuki Hashimoto, Saitama, JP;
Bausan Yuan, San Jose, CA (US);
Pai-Hsueh Yang, Palo Alto, CA (US);
Nikon Corporation, Tokyo, JP;
Abstract
Disclosed are, inter alia, optical components that include an optical element (e.g., mirror) and at least three active-isolation mounts mounting the optical element to a frame (e.g., optical barrel or optical frame). An active-isolation mount has a non-contacting actuator connecting a respective location on the optical element to the frame and provides movability of the respective location relative to the frame in at least one direction. At least one displacement sensor is associated with each respective location on the optical element. The displacement sensors are sensitive to displacements of the respective locations in at least one respective direction and reference the displacements to an absolute reference. The actuators and sensors are connected to a servo control loop to provide feedback control.