The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2011
Filed:
Feb. 04, 2009
Method of manufacturing a micro-electrical-mechanical system with thermally isolated active elements
Applicants:
Nathan Bluzer, Rockville, MD (US);
Silai V. Krishnaswamy, Monroville, PA (US);
Philip C. Smith, Ellicott City, MD (US);
Inventors:
Nathan Bluzer, Rockville, MD (US);
Silai V. Krishnaswamy, Monroville, PA (US);
Philip C. Smith, Ellicott City, MD (US);
Assignee:
Northrop Grumman Systems Corporation, Los Angeles, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of manufacturing a micro-electrical-mechanical system with thermally isolated active elements. Such a system may embody a bolometer, which is well suited for detecting electromagnetic radiation between 90 GHz and 30 THz while operating at room temperature. The method also discloses a generalized process for manufacturing circuitry incorporating active and passive micro-electrical-mechanical systems in a silicon wafer.