The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2011
Filed:
Jun. 20, 2008
Applicants:
Jaspreet Singh Dhau, Menlo Park, CA (US);
Sunity K. Sharma, Fremont, CA (US);
Inventors:
Jaspreet Singh Dhau, Menlo Park, CA (US);
Sunity K. Sharma, Fremont, CA (US);
Assignee:
SRI International, Menlo Park, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D 3/12 (2006.01); B05D 5/12 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for reducing porosity of metal layers on a substrate may comprise depositing a precursor onto at least a portion of the substrate, and adding metal layers over the precursor comprising at least one cycle, wherein each cycle comprises: depositing a metal layer over the precursor, and exposing the metal layer to a breath-out solution.