The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 02, 2011

Filed:

Aug. 27, 2007
Applicants:

Virgil R. Hester, Edelstein, IL (US);

Jeffrey P. Werner, Peoria, IL (US);

Inventors:

Virgil R. Hester, Edelstein, IL (US);

Jeffrey P. Werner, Peoria, IL (US);

Assignee:

Caterpillar Inc., Peoria, IL (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
Abstract

A workpiece support system for a vacuum coating machine includes a base table having a rotating spindle rod that extends in a vertical direction away from the base table and is capable of powered rotation. A stop post is connected to the table and extends in a vertical direction at a distance from the spindle rod. A workpiece support module is connected to the spindle rod and the stop post, and includes a rotating table with peripheral openings arranged symmetrically around its periphery, a plurality of cogs positioned in the openings, a stationary table connected to the stop post and axially supporting the rotating table, and a driver finger connected to the stationary table. At least one bearing is located around the spindle rod and rotatably isolates the rotating table from the stationary table.


Find Patent Forward Citations

Loading…