The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2011
Filed:
Aug. 10, 2010
Algirdas Vaskelis, Vilnius, LT;
Aldona Jagminiene, Vilnius, LT;
Ina Stankeviciene, Vilnius, LT;
Eugenijus Norkus, Vilnius, LT;
Algirdas Vaskelis, Vilnius, LT;
Aldona Jagminiene, Vilnius, LT;
Ina Stankeviciene, Vilnius, LT;
Eugenijus Norkus, Vilnius, LT;
Lam Research Corporation, Fremont, CA (US);
Abstract
Systems and methods for electroless deposition of a cobalt-alloy layer on a copper surface include a solution characterized by a low pH. This solution may include, for example, a cobalt(II) salt, a complexing agent including at least two amine groups, a pH adjuster configured to adjust the pH to below 7.0, and a reducing agent. In some embodiments, the cobalt-alloy is configured to facilitate bonding and copper diffusion characteristics between the copper surface and a dielectric in an integrated circuit.