The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2011
Filed:
Nov. 08, 2007
Seok-youn Kim, Gyeonggi-do, KR;
Jung-sung Hwang, Gyeonggi-do, KR;
Ho-young Lee, Gyeonggi-do, KR;
Do-hyun Kwun, Gyeonggi-do, KR;
Jung-shik Heo, Gyeonggi-do, KR;
Seok-Youn Kim, Gyeonggi-do, KR;
Jung-Sung Hwang, Gyeonggi-do, KR;
Ho-Young Lee, Gyeonggi-do, KR;
Do-Hyun Kwun, Gyeonggi-do, KR;
Jung-Shik Heo, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Abstract
A vibration control pedestal and an installation method thereof are disclosed, including a method for reducing particles and vibrations while moving equipment, including semiconductor equipment, from one vibration control pedestal to another. The vibration control pedestal includes an equipment support body having at least two equipment support cells. A cell connection unit passes through side surfaces of the equipment support cells and connects the equipment support cells to each other. A bottom structure installed under the equipment support body braces the equipment support body.