The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2011
Filed:
May. 17, 2005
Weisheng Lei, Portland, OR (US);
Glenn Simenson, Portland, OR (US);
Jeff Howerton, Portland, OR (US);
Mark Unrath, Portland, OR (US);
Weisheng Lei, Portland, OR (US);
Glenn Simenson, Portland, OR (US);
Jeff Howerton, Portland, OR (US);
Mark Unrath, Portland, OR (US);
Electro Scientific Industries, Inc., Portland, OR (US);
Abstract
Laser pulse energy adjustments are motivated by an understanding of the effect of laser pulse width variations among different lasers on satisfying a quality metric associated with a laser-processed target. In a preferred embodiment, the adjustments normalize this effect among different lasers drilling vias in a target specimen. The number of pulses delivered to the target specimen to form each via can be modified, based on the pulse energy applied to the via location, to control different via quality metrics.