The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2011
Filed:
Apr. 18, 2008
Method for preventing fencing during process of forming an air-bearing surface on a slider substrate
Sikwing Poon, Hong Kong, CN;
Hui Yin, Dongguan, CN;
Yongping Yang, Dongguan, CN;
Zeqing Jin, Dongguan, CN;
SikWing Poon, Hong Kong, CN;
Hui Yin, Dongguan, CN;
YongPing Yang, Dongguan, CN;
ZeQing Jin, Dongguan, CN;
SAE Magnetic (H.K.) Ltd., Hong Kong, CN;
Abstract
The invention provides a method for preventing fencing during process of forming an ABS on a slider substrate includes the steps of: (a) providing a slider substrate having a photo-resist covered thereon, the photo-resist having a plurality of trenches developed thereon, the plurality of trenches collectively defining an air bearing surface pattern, the plurality of trench each having at least a non-vertical sidewall, the at least non-vertical sidewall including a zigzag-shaped edge adjoining the slider substrate; (b) etching the photo-resist by oxygen ions, such that the zigzag-shaped edge is trimmed to be a straight edge and the at least non-vertical sidewall is trimmed to be a vertical sidewall; and (c) etching the slider substrate exposed from the trenches such that a fencing-free air-bearing surface is formed on the slider substrate.