The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2011
Filed:
Jul. 09, 2009
Jung-dae Park, Ansan-si, KR;
Pil-kwon Jun, Seoul, KR;
Bo-yong Lee, Osan-si, KR;
Tae-hyo Choi, Yongin-si, KR;
Da-hee Lee, Pyeongtaek-si, KR;
Seung-ki Chae, Seoul, KR;
Jung-Dae Park, Ansan-si, KR;
Pil-Kwon Jun, Seoul, KR;
Bo-Yong Lee, Osan-si, KR;
Tae-Hyo Choi, Yongin-si, KR;
Da-Hee Lee, Pyeongtaek-si, KR;
Seung-Ki Chae, Seoul, KR;
Samsung Electronics Co., Ltd., Suwon-Si, KR;
Abstract
A cleaning solution for a quartz part and a method for cleaning the quartz part are provided. The cleaning solution includes from about 5 to about 35 wt % of an ammonium compound, from about 7 to about 55 wt % of an acidic oxidizing agent, from about 5 to about 30 wt % of a fluorine compound and a remaining amount of water. Residual thin films and impurities on the surface of the quartz part may be removed while reducing the damage onto the quartz part.