The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 19, 2011

Filed:

Apr. 18, 2008
Applicant:

Kokichi Aiso, Hamamatsu, JP;

Inventor:

Kokichi Aiso, Hamamatsu, JP;

Assignee:

Yamaha Corporation, Hamamatsu-shi, Shizuoka-Ken, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 7/30 (2006.01); G01R 33/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A magnetic sensor includes a plurality of giant magnetoresistive elements, each of which includes a free layer, a conductive layer, and a pin layer sequentially laminated on a substrate, wherein the pin layer formed by sequentially laminating a first magnetic layer, an Ru layer, a second magnetic layer, and an antiferromagnetic layer is subjected to magnetization heat treatment so as to fix the magnetization direction thereof. The first and second magnetic layers differ from each other in thickness and magnetic moment thereof, and the thickness of the Ru layer ranges from 4 Å to 10 Å. The magnetization heat treatment is performed so as to maintain an anti-parallel state between the first and second magnetic layers. In order to detect magnetic fields in three-axial directions, one giant magnetoresistive element is formed using a planar surface, and the other giant magnetoresistive elements are formed using respective slopes on the substrate.


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