The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7982417 B1

PDF
Full Text
Expired
Date of Patent:
Jul. 19, 2011

Filed:

Apr. 08, 2009
Applicant:

Shinji Ohishi, Oyama, JP;

Inventor:

Shinji Ohishi, Oyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02K 41/00 (2006.01); H02P 7/00 (2006.01); H01L 21/027 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
Abstract

A stage unit includes the following elements. A stator includes a first coil array in which first coils extending in the x direction are arranged in the y direction, a second coil array in which second coils extending in the x direction are arranged in the y direction and which is located next to the first coil array in the x direction, and a third coil array in which third coils extending in the y direction are arranged in the x direction and which covers the first and second coil arrays. A movable member moves above the stator. A controller controls driving of the movable member by allowing current amplifiers to supply current to the coils included in the first, second, and third coil arrays. A switch is capable of connecting the first coil to the second coil.


Find Patent Forward Citations

Ohishi, Shinji. (2011). Stage unit, exposure apparatus, and device manufacturing method (U.S. Patent No. 7982417). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7982417

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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