The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2011
Filed:
Jan. 23, 2009
Hideharu Zenpo, Fukuoka, JP;
Hideo Yamamoto, Fukuoka, JP;
Toshiyuki Harada, Fukuoka, JP;
Yoshihiro Kusama, Fukuoka, JP;
Katsuya Okumura, Tokyo, JP;
Hideharu Zenpo, Fukuoka, JP;
Hideo Yamamoto, Fukuoka, JP;
Toshiyuki Harada, Fukuoka, JP;
Yoshihiro Kusama, Fukuoka, JP;
Katsuya Okumura, Tokyo, JP;
Kabushiki Kaisha Yaskawa Denki, Kitakyushu-shi, JP;
Abstract
A substrate holding apparatus includes a base plate with a two-pronged portion, a holding plate arranged above the base plate, a driving portion provided therebetween, a holding portion formed by a tip end of the two-pronged portion and a tip end of the holding plate, and a guide portion provided at the tip end of the two-pronged portion for guiding a part of the substrate. The driving portion includes an urging means for always urging a basal end side of the holding plate upward, an electric magnetic portion for drawing the holding plate toward the base plate, and a bearing portion arranged at on the tip end side of the base plate. The guide portion has a guide groove which comes into contact with a part of a periphery of the substrate.