The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2011
Filed:
Jul. 13, 2006
Francisco Javier Tamayo DE Miguel, Madrid, ES;
Johan Mertens, Le Teich, FR;
Montserrat Calleja Gómez, Madrid, ES;
Francisco Javier Tamayo De Miguel, Madrid, ES;
Johan Mertens, Le Teich, FR;
Montserrat Calleja Gómez, Madrid, ES;
Consejo Superior de Investigaciones Cientificas, Madrid, ES;
Abstract
The system for surface inspection is arranged to detect relative displacement and/or vibration features of a plurality of points of a plurality of elements () forming part of a mechanical structure (), such as a micro- or nanomechanical structure. A light beam is displaced along the mechanical structure along a first trajectory (A), so as to detect a plurality of subsequent reference positions (C) along said first trajectory (A), and the light beam is further displaced along the mechanical structure along a plurality of second trajectories (B), each of said second trajectories (B) being associated with one of said reference positions (C). The invention further relates to a corresponding method and to a program for carrying out the method.