The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2011
Filed:
Jul. 25, 2008
Jeff A. Ridley, Shorewood, MN (US);
Max Glenn, Chanhassen, MN (US);
James C. Nohava, Inver Grove Heights, MN (US);
Robert D. Horning, Savage, MN (US);
Jane Rekstad, Maple Grove, MN (US);
Jeff A. Ridley, Shorewood, MN (US);
Max Glenn, Chanhassen, MN (US);
James C. Nohava, Inver Grove Heights, MN (US);
Robert D. Horning, Savage, MN (US);
Jane Rekstad, Maple Grove, MN (US);
Honeywell International Inc., Morristown, NJ (US);
Abstract
An improved MEMS device and method of making. Channels are formed in a first substrate around a plurality of MEMS device areas previously formed on the first substrate. Then, a plurality of seal rings are applied around the plurality of MEMS device areas and over at least a portion of the formed channels. A second substrate is attached to the first substrate, then the seal ring surrounded MEMS device areas are separated from each other. The channels include first and second cross-sectional areas. The first cross-sectional area is sized to keep saw debris particles from entering the MEMS device area.