The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2011
Filed:
May. 19, 2006
Applicants:
Yasuhiro Yoshikawa, Kyoto, JP;
Hiroyuki Tajiri, Kyoto, JP;
Inventors:
Yasuhiro Yoshikawa, Kyoto, JP;
Hiroyuki Tajiri, Kyoto, JP;
Assignee:
Rohm Co., Ltd., Kyoto, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); H01L 21/00 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An MEMS element (A) includes a substrate (), and a first electrode () formed on the substrate (). The MEMS element (A) further includes a second electrode () including a movable portion () spaced from the first electrode () and facing the first electrode. The movable portion () is formed with a plurality of through-holes (). Each of the through-holes () may have a rectangular cross section.