The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 12, 2011

Filed:

Sep. 06, 2006
Applicants:

Hisataka Fujimaki, Hitachinaka, JP;

Satoshi Totake, Hitachi, JP;

Inventors:

Hisataka Fujimaki, Hitachinaka, JP;

Satoshi Totake, Hitachi, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K 5/04 (2006.01);
U.S. Cl.
CPC ...
Abstract

A charged particle beam irradiation system includes an accelerator for accelerating a charged particle beam, a beam irradiation apparatus having a beam energy modulator and arranged for irradiating an object with the charged particle beam extracted from the accelerator and having passed the beam energy modulator, which is rotated and whose thickness in the axial direction differs in the rotational direction, and a controller for controlling the extraction intensity of the charged particle beam extracted from the accelerator, while the charged particle beam is being extracted, on the basis of the rotational angle of the beam energy modulator.


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