The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2011
Filed:
May. 08, 2008
John L. Ebel, Beavercreek, OH (US);
Rebecca Cortez, Schenectady, NY (US);
Kevin D. Leedy, Centerville, OH (US);
Richard E. Strawser, Greenville, OH (US);
Donald E. Strawser, Legal Representative, Greenville, OH (US);
John L. Ebel, Beavercreek, OH (US);
Rebecca Cortez, Schenectady, NY (US);
Kevin D. Leedy, Centerville, OH (US);
Richard E. Strawser, Greenville, OH (US);
Donald E. Strawser, legal representative, Greenville, OH (US);
The United States of America as represented by the Secretary of the Air Force, Washington, DC (US);
Abstract
A process for making a latching zip-mode actuated mono wafer MEMS switch especially suited to capacitance coupled signal switching of microwave radio frequency signals is disclosed. The single wafer fabrication process used for the switch employs sacrificial layers and liquid removal of these layers in order to also provide needed permanent physical protection for an ultra fragile switch moving arm member. Latched operation of the achieved MEMS switch without use of conventional holding electrodes or magnetic fields is also achieved. Fabrication of a single MEMS switch is disclosed however large or small arrays may be achieved. A liquid removal based fabrication process is disclosed.