The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 12, 2011

Filed:

Feb. 06, 2007
Applicants:

Hiroshi Imamura, Nagaokakyo, JP;

Hiroaki Takeuchi, Tokyo, JP;

Koji Ishikawa, Nagoya, JP;

Hiroshi Suzuki, Nagoya, JP;

Akira Moriya, Nagoya, JP;

Katsuyoshi Harada, Tokyo, JP;

Inventors:

Hiroshi Imamura, Nagaokakyo, JP;

Hiroaki Takeuchi, Tokyo, JP;

Koji Ishikawa, Nagoya, JP;

Hiroshi Suzuki, Nagoya, JP;

Akira Moriya, Nagoya, JP;

Katsuyoshi Harada, Tokyo, JP;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/68 (2006.01);
U.S. Cl.
CPC ...
Abstract

Hexachlorodisilane is decomposed into hydrochloric acid, silicon dioxide and water by introducing hexachlorodisilane-containing flue gas into a reaction region without moistening the flue gas and by supplying oxygen-containing gas that also contains a small amount of moisture to the reaction region maintained at a temperature at which hexachlorodisilane decomposes.


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