The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 12, 2011

Filed:

Feb. 25, 2009
Applicants:

Yasumi Sago, Tachikawa, JP;

Masayoshi Ikeda, Hachioji, JP;

Kazuaki Kaneko, Setagaya-ku, JP;

Takuji Okada, Tachikawa, JP;

Inventors:

Yasumi Sago, Tachikawa, JP;

Masayoshi Ikeda, Hachioji, JP;

Kazuaki Kaneko, Setagaya-ku, JP;

Takuji Okada, Tachikawa, JP;

Assignee:

Canon Anelva Corporation, Kawasaki-Shi, Kanagawa, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of using a heat exchanger efficiently and uniformly to cool or heats portions to be controlled to a prescribed temperature, and then continuously carry out stable processing. The heat exchanger is constructed by arranging partition walls between two plates to form a fluid channel and a fin parallel with the channel or inclined by a prescribed angle on each of the two plates insides the channel so that the plate or a member in contact with the plate is cooled or heated with the fluid flowing through the channel.


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