The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2011
Filed:
Oct. 14, 2006
Applicants:
Igor Ivanov, Danville, CA (US);
Robert D. Tas, Aromas, CA (US);
Shashank Ravindra Kulkarni, Santa Clara, CA (US);
Ron Rulkens, Milpitas, CA (US);
Inventors:
Igor Ivanov, Danville, CA (US);
Robert D. Tas, Aromas, CA (US);
Shashank Ravindra Kulkarni, Santa Clara, CA (US);
Ron Rulkens, Milpitas, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D 5/12 (2006.01); B28B 19/00 (2006.01); B29B 15/10 (2006.01); C23C 18/00 (2006.01); C23C 20/00 (2006.01); C23C 24/00 (2006.01); C23C 26/00 (2006.01); C23C 28/00 (2006.01); H01C 17/06 (2006.01); H05K 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An electroless plating system includes a plating solution, and controlling reducing agents in the plating solution for deposition over outlier features smaller than about five hundred nanometers and isolated by about one thousand nanometers.