The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7968426 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 28, 2011

Filed:

Oct. 23, 2006
Applicants:

Nasser K. Budraa, La Crescenta, CA (US);

Boon NG, Alhambra, CA (US);

Inventors:

Nasser K. Budraa, La Crescenta, CA (US);

Boon Ng, Alhambra, CA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01);
U.S. Cl.
CPC ...
Abstract

Systems and methods are disclosed for bonding of substrates using microwave energy. In some embodiments, semiconductor substrates can be bonded through a thin interlayer metal to a metal substrate by using microwave energy. High intensity microwave energy is applied to the substrate assembly positioned within a microwave cavity. A process of selective heating can occur in the thin interlayer metal, resulting in melting of the thin interlayer metal to facilitate bonding of the two substrates. Some of the advantages associated with such bonding process are disclosed.


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Budraa, Nasser. (2011). Systems and methods for bonding semiconductor substrates to metal substrates using microwave energy (U.S. Patent No. 7968426). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7968426

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