The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2011
Filed:
Aug. 20, 2009
Mark Schirmer, Stoughton, MA (US);
John Dixon, Van Nuys, CA (US);
Raymond Goggin, Watergrasshill, IE;
Padraig Fitzgerald, Mallow, IE;
David Rohan, County Limerick, IE;
Jo-ey Wong, Wayland, MA (US);
Mark Schirmer, Stoughton, MA (US);
John Dixon, Van Nuys, CA (US);
Raymond Goggin, Watergrasshill, IE;
Padraig Fitzgerald, Mallow, IE;
David Rohan, County Limerick, IE;
Jo-ey Wong, Wayland, MA (US);
Analog Devices, Inc., Norwood, MA (US);
Abstract
A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.