The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2011
Filed:
Aug. 08, 2003
Applicants:
Toshimitsu Kohara, Hyogo, JP;
Hiroshi Tamagaki, Hyogo, JP;
Yoshimitsu Ikari, Hyogo, JP;
Inventors:
Assignee:
Kobe Steel, Ltd., Kobe-shi, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
For forming alumina films on substrates by sputtering of an aluminum metal target in an oxidizing gas-containing atmosphere, a method of producing α crystal structure-based alumina films efficiently includes as an early film formation, forming films under conditions suited for formation of α crystal structure alumina. For example the forming forms films of αcrystal structure alumina in a poisoning mode discharge condition only in an early stage of film formation.