The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2011
Filed:
Jun. 26, 2006
Applicants:
Erik Sauar, Oslo, NO;
Per Arne Wang, Porsgrunn, NO;
Inventors:
Erik Sauar, Oslo, NO;
Per Arne Wang, Porsgrunn, NO;
Assignee:
REC Scanwafer AS, Porsgrunn, NO;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 7/00 (2006.01); H01L 21/70 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for reducing attraction forces between wafers () is provided. This method includes the step of, after sawing and before dissolution of the adhesive (), introducing spacers () between wafers (). A wafer singulation method and an agent for use in the method are also provided.